JPH085551Y2 - ダイの位置ずれ補正装置 - Google Patents
ダイの位置ずれ補正装置Info
- Publication number
- JPH085551Y2 JPH085551Y2 JP1988138519U JP13851988U JPH085551Y2 JP H085551 Y2 JPH085551 Y2 JP H085551Y2 JP 1988138519 U JP1988138519 U JP 1988138519U JP 13851988 U JP13851988 U JP 13851988U JP H085551 Y2 JPH085551 Y2 JP H085551Y2
- Authority
- JP
- Japan
- Prior art keywords
- die
- stage
- positional deviation
- correction
- standby position
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000003028 elevating effect Effects 0.000 claims description 7
- 238000006073 displacement reaction Methods 0.000 description 7
- 230000008859 change Effects 0.000 description 3
- 230000007246 mechanism Effects 0.000 description 3
- 238000003825 pressing Methods 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Die Bonding (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988138519U JPH085551Y2 (ja) | 1988-10-24 | 1988-10-24 | ダイの位置ずれ補正装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988138519U JPH085551Y2 (ja) | 1988-10-24 | 1988-10-24 | ダイの位置ずれ補正装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0260239U JPH0260239U (en]) | 1990-05-02 |
| JPH085551Y2 true JPH085551Y2 (ja) | 1996-02-14 |
Family
ID=31400931
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988138519U Expired - Lifetime JPH085551Y2 (ja) | 1988-10-24 | 1988-10-24 | ダイの位置ずれ補正装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH085551Y2 (en]) |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60248323A (ja) * | 1984-05-25 | 1985-12-09 | 松下電工株式会社 | ダイボンダ−のセンタリング装置 |
| JPH0680693B2 (ja) * | 1986-03-19 | 1994-10-12 | 三菱電機株式会社 | 半導体製造装置 |
-
1988
- 1988-10-24 JP JP1988138519U patent/JPH085551Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0260239U (en]) | 1990-05-02 |
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